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Design of Turbo-Molecular High Vacuum Pumps

Authors: Demikhov K.E., Nikulin N.K. Published: 03.09.2014
Published in issue: #3(44)/2001  

DOI:

 
Category: Design  
Keywords:

Approaches to improvement of turbo-molecular high vacuum pumps are considered. Design methods are given for combined turbo-molecular high vacuum pumps and also for the flow section of oil-free molecular viscosity vacuum pumps. Results of a flow section design for molecular viscosity flows are presented in comparison with those for the analogous vortex vacuum pump.