Designing technological processes for manufacturing evaporated target
| Authors: Vlasov A.V., Seliverstov D.G. | Published: 28.05.2015 |
| Published in issue: #2(31)/1998 | |
| Category: Production Process Procedures and Machines | |
| Keywords: | |
Method to design initial geometry of a capsule so as to manufacture targets by hot isostatic pressure on the ground of required final dimensions of a powder blank, is proposed. The developed approach is illustrated by designing the W-Si target on a titanium backing.
