Определение эффективного диапазона давлении газа на стороне всасывания турбомолекулярного вакуумного насоса

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К.Е. Демихов, А.А. Очков
94 ISSN 0236-3941. Вестник МГТУ им. Н.Э. Баумана. Сер. Машиностроение. 2016. № 5
EFFECTIVE RANGE OF GAS PRESSURE AT THE SUCTION SIDE
OF THE TURBOMOLECULAR VACUUM PUMP
K.E. Demikhov
A.A. Ochkov
Bauman Moscow State Technical University, Moscow, Russian Federation
Abstract Keywords
The choice of a vacuum pump type is crucial for the right gas
parameters at the suction side such as, for example, gas pres-
sure range. Currently the most widespread pumps are turbo-
molecular vacuum ones. They have salient advantages in effi-
ciency over the competition at a certain gas pressure range.
Based on the calculation method designed at Bauman Moscow
State Technical University we conducted the research of gas
pressure range estimation at the suction side of the pump. This
paper offers recommendations as to how to choose the work-
ing range of gas pressure for turbomolecular vacuum pumps
Turbomolecular vacuum pump,
pump parameter, gas pressure,
suction side of the pump
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Demikhov K.E. — Dr. Sci. (Eng.), Professor, Head of Vacuum and Compressor Equipment
Department, Bauman Moscow State Technical University (2-ya Baumanskaya ul. 5, Moscow,
105005 Russian Federation).